Detection of Wafer Defects

For microscopy purposes, 2D chromatic confocal line cameras are also available. For applications where very high resolution and a large depth of focus are required, these provide a perfect focus on the Z-axis. That's what makes them the right solution for inspecting  defects, for example on the wafer edge and during the packaging process. All these types of sensors can be integrated inside metrology and inspection machines. The decades of experience of Marposs and STIL are available for a customized solution and dedicated optical design.