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Non-contact defects inspection

Vision systems have a dual role: to provide a good quality image of the sample surface at the desired magnification and to process the image in order to detect and analyze certain predefined features or textures.

Although processing units are becoming more and more powerful, the main limitation of current vision systems is their very small depth of field (a few tens of µm or less, depending on the magnification and numerical aperture).

Because of this limitation, expensive and complicated Z-scanning systems and/or an automatic focusing mechanism are required to visualize samples with larger Z-extension as well as moving ones.

Defect inspection solution from STIL / MC2 family of products offers a depth of focus a hundred times larger than actual vision solution that reduce pressure on focusing solution and translation/carrier flatness.

 

Non-contact defects inspection
DESCRIPTION

Chromatic confocal microscopy is a technology that enables the design of optical systems with a very large depth of field/focus (up to several mm).

For samples located anywhere in the extended depth of field/focus, these systems provide a sharp, high quality and perfectly focused image.

This technology combines the merits of color coding and traditional confocal microscopes.

Chromatic confocal microscopes consist of a slit illuminated by a polychromatic light source, a high quality chromatic objective, a beam splitter and a 4K line camera.

BENEFITS
  • Large Depth Of Field/Focus (DOF): Millimeters DOF instead of 10th of µm for microscopes
  • Less/no focusing required
  • Possible focus on glass & mirror
  • Resolution (X-Y) pixel size on sample ≥ 0,43 µm*0.43µm
  • High speed up to 199.5 klines per second
  • Works on any material metal (polished or rough): glass, ceramics, plastics…
TECH SPECS

Model

Unit

NanoView (new)

MicroView

WireView

DeepView (mk2)

SuperView

Part number

 

OPSTM702001

OPSTM704001

OPSTM708001

OPST0706002

OPSTM709001

Line Length

mm

1,34

1,8

1,51

4,2

12,85

Depth of Field

µm

120

500

900

2600

2000

Working Distance

mm

7,4

10,1

7,8

19,5

11,3

Max. Frequency Acquisition

 

199 500

199 500

199 500

199 500

199 500

Magnification

 

17,3

12,9

15,6

5,6

1,8

Numerical Aperture

 

0,75

0,5

0,75

0,37

0,33

Max. Sample Slope

°

43

30

46

20

17

Pixel Size on the Sample

µm

0,43

0,58

0,49

1,35

4,1

Optical Part : Length

mm

421,6

412,8

468

400,5

370

Optical Part : Diameter

mm

50

50

70

60

60

Optical Part : Weight

g

5300

5200

5800

5850

5600

Download

BROCHURES AND MANUALS

Brochure
English STIL - General Catalogue: (13.23MB)
Japanese STIL - General Catalogue: (21.22MB)
Simplified Chinese STIL - General Catalogue: (18.78MB)
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